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Goehnermeier, Aksel

Mon, 2012/11/19 - 15:31 — Aksel Goehnermeier, Carl Zeiss AG, DE
First Name: 
Aksel
Last Name: 
Goehnermeier
Kind of Address: 
Headquarter Address
Address: 
Rudolf-Eber-Str. 2
Zipcode: 
73447
City: 
Oberkochen
Country: 
Germany
Email: 
goehnermeier@smt.zeiss.com
Company / Institute: 
Carl Zeiss SMT GmbH
Bio and Interests: 
I received my diploma degree in physics from the Humboldt University of Berlin. I joined Carl Zeiss SMT GmbH, Oberkochen, Germany, in 1999, where I am now working in the department of Systems Engineering. My research interests include simulation of birefringence, aberrations and straylight in lithographic imaging processes and next generation lithography systems. My current fields of work focus on future semiconductor devices and their implications on manufacturing processes.