Ecosystems Technology and Design for Nanoelectronics

NCSR Demokritos/IMEL Website: www.imel.demokritos.gr

The Institute of Microelectronics (IMEL) is one of the eight Institutes of the National Center for Scientific Research (NCSR) “Demokritos”, the largest research Center in Greece. IMEL is today established as the national Center of Excellence in Nanoelectronics and MEMS/NEMS.
Research at IMEL focuses in three main fields: a) Micro and Nanofabrication processing b) Nanostructures and Nanoelectronic devices and c) Materials and devices for sensors and MEMS/NEMS. The infrastructure available includes full Si processing capability in a clean room area of 500 m2, advanced micro and nanofabrication equipment and equipment for structural, electrical and optical characterization, testing equipment and advanced design, modeling and simulation tools.
IMEL participates very actively in EU RTD projects and Networks of Excellence in its field of expertise. It is one of the founding members of the European Institute of Nanoelectronics SiNANO and is currently involved in several FP7 projects. It provides access to its infrastructure at EU level, funded at present through the EU project FP6 ICT I3 ANNA. In this proposal the research group on Nanostructures for Nanoelectronics, Photonics and Sensors (NNPS) headed by Androula Nassiopoulou will be involved that currently comprises 12 researchers.
Technical areas of expertise
Semiconductor nanostructures (nanocrystals, nanowires), electrochemical processes on Si (porous Si, self-assembled porous alumina), templated Si nanopatterning, nanocrystal non-volatile memories, thermal and chemical sensors, on-chip RF passives, MEMS/NEMS.